Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces
$19,471.28
Ai RF500 series RF generators provide 500 watts of power and a 13.56MHz frequency, they can accommodate up to 150mm OD tubes and are ideal for PECVD (Plasma Enhanced Chemical Vapor Deposition) systems in application like plasma etching, plasma cleaning and plasma polymerization.
Description
Ai RF500 series RF generators provide 500 watts of power and a 13.56MHz frequency, they can accommodate up to 150mm OD tubes and are ideal for PECVD (Plasma Enhanced Chemical Vapor Deposition) systems in application like plasma etching, plasma cleaning and plasma polymerization.
Specifications
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